MKS Instruments, Inc.

MKS Instruments, Inc. is a global provider of process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, control and information technology, ozone generation and delivery, RF & DC power, reactive gas generation, and vacuum technology.

Pressure Measurement & Control

MKS is the leader in pressure and vacuum measurement. The MKS family of pressure and vacuum measurement instruments includes Baratron® Capacitance Manometers, Pressure Sensors, Pressure Switches and Pressure Control Subsystems.

The MKS family of solutions for control of vacuum and pressure include downstream valves and controllers, upstream valves and controllers, vacuum isolation valves and integrated solutions. Our broad offering includes high speed butterfly control valve, high speed pendulum valves, SST isolation valves, as well as closed-loop pressure controllers with advanced model based control.

MKS is the established leader in downstream pressure control subsystems which integrate exhaust throttle valves, advanced digital controllers and Baratron® process manometers. Our total solutions provide higher throughput with faster set points, reduced overshoot/undershoot, and increased uptime.

Flow Measurement & Control

MKS family of mass flow controller instruments measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing.

Mass Flow Controllers (MFCs) and Mass Flow Meters (MFMs) from MKS Instruments are available with either analog or digital communication, and with elastomer or metal seals. Analog mass flow controllers and mass flow meters are ideal for basic applications, offering high performance in a simple and cost effective package. Digital mass flow controller and mass flow meter devices offer several advantages over analog mass flow controllers and mass flow meters – improved diagnostic capabilities, multi-gas capability in a single package and multi-range capability for reduced spares requirement and overall lower cost of ownership.

RF & DC Power

MKS is a leading manufacturer of high reliability, compact, solid state, mid to extended (VHF) frequency RF power generators, impedance matching networks and plasma metrology, RF amplifiers for MRI equipment, and pulsed and continuous DC power generators in power levels up to 60 kW.

Vacuum Technology

MKS is the leader in pressure and vacuum measurement. The MKS family of pressure and vacuum measurement instruments includes Vacuum & Pressure Gauges, Vacuum & Pressure Transducers, and Vacuum & Pressure Gauge Controllers.

Radiation Resistant Gauges: MKS offers Pirani and Cold Cathode Sensors bakeable to 250°C with Suitable cables and controllers for Radiation Environments.

Residual Gas Analysis/Mass Spectrometry

RGA in-situ Process Monitoring

MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA’s, analytical equipment, and process RGAs and control software.

  • »   Vacuum Monitoring and e-Diagnostics
  • »   Ultra High Vacuum (UHV)
  • »   CVD Processes
  • »   Vacuum Baseline RGA
  • »   Ion Implant
  • »   Photoresist Detection
  • »   High-Pressure RGA
  • »   PVD
  • »   Etch
  • »   Diffusion
  • »   Transfer Chamber Monitoring
  • »   Leak Detection
  • »   Atmospheric Pressure Gas Analysis

Radiation Resistant Residual Gas Analyzer: MKS Offers Residual Gas Analyzers with special extenders that allow the analyzer to be operated in harsh environments like high temperature/ionizing radiation with the electronics located in a safe/shielded position.

FTIR, NDIR Infrared Gas Analysis Instruments

FTIR (Fourier Transform Infrared) and NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS Instruments are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.

Calibration Products

MKS offers a comprehensive line of calibration products for vacuum and flow. Whether your need is for a handy, portable in situ verification cart for use on the production floor or a laboratory grade metrology system, MKS has what you need to maintain the accuracy and traceability of your instruments.

Plasma Sources &Ozone Products

MKS designs and manufactures RF torroidal and microwave plasma sources to energize and dissociate gases. Fluorine based gases such as NF3 are used to clean unwanted deposits from the walls of vacuum process chambers. Plasma sources for process chemistries include oxygen, nitrogen, and hydrogen.

MKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.

Learn More About MKS products