Product service offering

Repair & Calibration

Meeting the highest national standards

At VT Vacuum Technologies, as a representative of MKS Instruments, Inc., we understand that establishing a consistent regular calibration program for your gas pressure and flow instrument is critical to ensuring repeatable processes within a tool, between tools in the same facility, between tools in duplicate facilities, and when transferring processes from R&D to production. Ensuring instrument calibrations that are accurate and traceable is essential to meeting the documentation needs for ISO 9000 or SEMI standards.

All MKS Calibration and Repair Centers are run by trained service engineers using the latest in calibration equipment. If components are replaced during calibration, your unit is run through a zero stability test. This test ensures that changes in ambient temperature conditions cause only predictable changes (within published specifications) in the instrument measurement. Instrumentation is returned complete with calibration data showing traceability to the appropriate national standards laboratory or government agency.


MKS calibration labs in India are capable of traceable measurements for gas pressure from 1 x 10-5 Torr to 1000 Torr; and for gas flow from 10 sccm to 30,000 sccm/ 30 slm (nitrogen equivalent). Calibrations are directly traceable to the National Institute of Standards and Technology (NIST), USA.

To ensure that equipment received is properly serviced and tracked, it is required that you obtain a Material Authorization Number (MA#) prior to returning the equipment to our Calibration and Service Center.

When Should Instruments Be Calibrated?

One might get doubt regarding when an instrument should be calibrated. The charts below show the recommended calibration intervals for pressure and gas flow instruments. More frequent calibrations can be scheduled in order to obtain data required for SPC.


Please contact our service center for additional information at the following address:

Address:#36A, ‘Krishna House’, AGS Layout, MSR Nagar, Bangalore 560054, India
Phone:080-23603253/41748063 Ext: 115 Fax: 080-23605664
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